AGILTRON'S MEMS Foundry Service
Agiltron's MEMS foundry Service
From preproduction to high volume production.
Design, Simulation, and Consulting
Testing
From complete devices to single process steps
Deep Reactive Ion Etch (Bosch process)
Photoresist Removal and Release (Ashing)
Electroplating of gold, platinum, copper, nickel-iron
Dicing
Sputtering and Evaporation
PECVD (silicon nitride and silicon dioxide)
5X Stepper with resolution down to 0.5 μm
Why choose Agiltron?
Commitment to Quality (ISO 2001)
Statistical Process Control (SPC)
Capabilities
Experience (hundreds of person years and twenty years of facility experience)
Favorable IP position, if you pay to develop a process, the process information is yours to use at another foundry
Agiltron is a leading innovator and manufacturer of photonic components and systems. We are currently producing our own MEMS devices in high volume and own our fabrication equipment.
Contact
Dr. Andy Oliver, Email: MEMS@agiltron.com,
Tel: 781-935-1200 Ext.132