AGILTRON'S MEMS Foundry Service
Agiltron's MEMS foundry Service
  • From preproduction to high volume production.

  • Design, Simulation, and Consulting

  • Testing

  • From complete devices to single process steps
    • Deep Reactive Ion Etch (Bosch process)
    Photoresist Removal and Release (Ashing)
    Electroplating of gold, platinum, copper, nickel-iron
    Dicing
    Sputtering and Evaporation
    PECVD (silicon nitride and silicon dioxide)
    5X Stepper with resolution down to 0.5 μm
    Why choose Agiltron?
  • Commitment to Quality (ISO 2001)

  • Statistical Process Control (SPC)

  • Capabilities

  • Experience (hundreds of person years and twenty years of facility experience)

  • Favorable IP position, if you pay to develop a process, the process information is yours to use at another foundry

  • Agiltron is a leading innovator and manufacturer of photonic components and systems. We are currently producing our own MEMS devices in high volume and own our fabrication equipment.

    • Contact
  • Dr. Andy Oliver, Email: MEMS@agiltron.com, Tel: 781-935-1200 Ext.132