AGILTRON'S MEMS Foundry Service

Application Note
Agiltron operates a 6" mEMS foundry and specializes in novel design
  • From preproduction to high volume production.
  • Design, Simulation, and Consulting
  • Testing
  • Package
  • From complete devices to single process steps.Our processes includes:
  • Deep Reactive Ion Etch (Bosch process)
    Photoresist Removal and Release (Ashing)
    Electroplating of gold, plati