AGILTRON'S MEMS Foundry Service

Agiltron operates a 6" mEMS foundry and specializes in novel design
  • From preproduction to high volume production.
  • Design, Simulation, and Consulting
  • Testing
  • Package
  • From complete devices to single process steps.Our processes includes:
    • Deep Reactive Ion Etch (Bosch process)
    Photoresist Removal and Release (Ashing)
    Electroplating of gold, platinum, copper, nickel-iron
    Dicing
    Sputtering and Evaporation
    PECVD (silicon nitride and silicon dioxide)
    5X Stepper with resolution down to 0.5 μm
    Why choose Agiltron?
  • With over 10 MEMS PhD professionals and technician specialists
  • Cost effective
  • Result oriented
  • Open communication
  • Commitment to Quality (ISO 2001)
  • Statistical Process Control (SPC)
  • Commercial production expertise
  • Experience (hundreds of person years and twenty years of facility experience)
  • Favorable IP position, if you pay to develop a process, the process information is yours to use at another foundry

    • Contact
  • Dr. Guido Zhong and Dr. Amit Ghosh, Email: MEMS@agiltron.com