Equipment List
| MRS Sputter tool | Microscope Inspection | Asher Resist Strip |
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| PECVD Deposition PlasmaTherm | LAM 490 RIE etcher (during installation) | UV Fusion tool |
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| KLA CD measuring tool | ASML Stepper | LAM 590 Etcher |
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| Nordiko Sputtering system | Scorpio Spinon Robotic System | Develop Track |
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| Laser Scribe | SEM | Dicing Saw |
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| STS DRIE | FEI FIB | update later |
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