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Senior Engineer (MEMS Processing)

    Job Description

    The Agiltron MEMS Engineering and Fabrication Team is responsible for developing and prototyping new MEMS devices with sufficiently high yield, which can be transferred to volume production. The Senior MEMS Process Engineer will play an integral role in concept and process development by analyzing engineering wafer data, understanding device failure modes and finding solutions, and establishing process control plans. The successful candidate will have the ability to collaborate with internal teams on MEMS design, packaging, new product introduction and operations.

    Preferred MEMS Process/Tool Experience:


  • Hands on experience in ASML 5X and GCA Steppers both i-line and DUV (PAS 5000/80,100,200,250) , Scanners, Contact/Projection Aligners
  • Photo-Resist processing experience with: 193nm, 248nm, 365nm, 436-broadband and E-beam; Positive resist: UV210, UV110, UV6, SPR220, SPR700, TOK, MIR701, FujiFilm/ARCH, AZ thick-resists such as 46P20, 4400 Series for MEMS applications. Negative resists: PMMA, SU8. Experience in Image Reversal, bi-layer lift- off processes.
  • Dry/Wet Etching:

  • DRIE of Silicon using STS ICP RIE and Ion Beam Etch (Vecco). Dry Etching of Metals using Oxford, LAM, TEL Tools, Dielectric Etching Using LAM/Oxford/Alcatel
  • Wet Etching: Si Etch using KOH and metals (Al, Au, Ti, TiW, Cr) widely used for MEMS/MOEMS.
  • Deposition Tools:

  • E-beam, MRC, ALD, PECVD (Plasma Therm/Oxford
  • Preferred Qualifications & Education:

  • Degree in Engineering, Materials Science or Physics (advanced degree preferred)
  • Minimum of 8 years of MEMS industry experience
  • Extensive experience with statistical data analysis and semiconductor failure analysis
  • Hands on experience with semiconductor and MEMS fabrication tools, processes and integration
  • Agiltron is an Equal Opportunity Employer (EOE-MFDV). In order to satisfy International Traffic in Arms Regulations (ITAR), only candidates who are able to demonstrate they are a U. S. Person, as defined in the ITAR 22 CFR 120.15 will be considered. Individuals with Disabilities and Veterans encouraged to apply.

Please send resume including job code and salary requirements via email or FAX :

Rose Doyon, HR Manager


Fax: 781-935-2040

No Agencies, please.